diener electronic : Etching


	Etching Process in which a surface, in mostcases of a metal, is cleaned by removing surface oxide or passivefilms. Etching can either be accomplished by dipping into an acidor alkaline solution or by plasma treatment (“plasma etching”) in anappropriate process gas. Examples for the application of etching processesare silicon, SiO2 and Si4N3 in microelectronics as well as metalswith surface oxide and nonadherent polymers such as PTFE.

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