diener electronic : Plasma colour


	Plasma colour Plasma color is caused by emissionof high energetic atoms, ions or molecules during relaxation to lessenergetic states. As the energy states in every gas have differentdifferences, every process gas features different characteristicemissions and hence different characteristic colors. The typicalcolours of several gases frequently employed in plasma processes are asfollows: CF4: blue SF6: white blue SiF4: light blue SiCl4: light blue Cl2: whitish green CCl4: whitish green H2: pink O2: pale yellow N2: red to yellow Br2: reddish He: red to violet Ne: brick red Ar: dark red Apart from the determination of theprocess gas, the plasma colour can also be used for a qualitativeestimation of the process gases purity from contaminations.

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