diener electronic : Sputtering


	Sputtering Designation for plasma cleaning involving the bombardment of high energyions from a plasma onto a surface, thereby removing surface atoms. Inpure sputter processes, Argon is often employed as process gas. Plasmacleaning by sputtering is also designated “micro-sandblasting”.Furthermore, sputtering is applied in thin film technology as a methodfor the generation of vapour phases with definite composition bybombardement of a sample of the desired material (the so-called target).

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