diener electronic : Turbomolecular pump


	Turbomolecular pump Turbomolecular pumps, sometimes also termed as turbo pumps are pumps forextremely low pressure (down to 10-10 mbar), composed of series ofaligning rotors and stators, comparable to a jet engine. The turningfrequencies of turbomolecular pumps amount several 10000 /min. As thepumping volume of turbomolecular pumps decreases with increasingpressure, they can only be run in connection with another pump, usually arotating vane pump. Turbomolecular pumps are often used in plasma deviceswhen very low pressures not available with other pump types (rotatingvane, roots) are desired.

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