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Plasma Plasma systems Surface-Technology

专业术语

等离子体物理常用术语

下列词汇是等离子体物理界最重要的一些术语﹒

注意︰为了要找到你所要查的术语，请用您的流览器搜寻功能，或是在搜尋字母表內的字母上点一下，就可找到这个字母开头所有术语。

Index

1 13.56 MHz,

2 2.45 GHz, 27.12 MHz,

4 40 kHz,

A ABS 树脂, Acid 酸, Acrylic 丙烯酸, Activation 活化, Active species 活性物种, Adhesion 黏附, Adhesion promoters 附着性的改善, Adsorption 吸附, AFM 原子力显微镜, Aluminium 铝, Aluminium Oxide 氧化铝, Anisotropic 各向异性, Anode 阳极, Antiadhesive layers 反胶层, Applications 应用, Arc 弧, Areas of application 应用领域, Argon (Ar) 氩气, Auger effect 俄歇效应, Automotive engineering 汽车工业,

B Barrel reactor 桶反应堆, Barrier layers 势垒层, BGA 球栅阵列, Bias voltage 偏置电压, Binding energy 结合能, Bonding 粘接,

C Case hardening 表面硬化, Cathode 阴极, Chamber 舱体, Charge-exchange collision电荷碰撞, Chemical etching 化学蚀刻, Chemisorption 化学吸附, Chromium 铬, Circuit board 电路板, Cleaning 清洁, Cleaning aluminium 清洁铝, Cleaning copper 清洁铜, Coating 涂装, Coating adhesion 涂层附着力, Coating thickness 涂层厚度, Components of plasma systems 等离子体系统的组成部分, Contact angle 接触角, Coppe 铜, Corona discharge 电晕放电, Corrosion 腐蚀, Cratering 油漆凹坑, Cross-cut tape test 十字切割测试, CVD 化学气相沉积,

D Degreasing 脱脂, Desmear process 去钻污工艺, Desorption 解吸, Direct current source / alternating voltage source 直流电源/交流电源, DLC 层, Downstream reactor 顺流反应器, Duplex surface engineering 双面表面工程,

E Electrode电极, Electron 电子, Electron volt 电子伏, Electronegative plasma 负压等离子体, Electropositive plasma 正压等离子体, Epilam coats 油膜表面活性, Epitaxy 外延, ESCA 能谱, Etching 蚀刻, Etching mask 蚀刻掩膜, Etching of glass 玻璃蚀刻, Etching of PCBs PCB 蚀刻,

F Finish 最后工序, Fluorescent tube 日光灯管, Fluxing agent 熔合剂, Foil treatment 箔膜处理, Funktionalization 高效能,

G Gallium Arsenide 砷化镓, Gas discharge 气体放电, GDOS 辉光放电光谱, Generator 发生器, Glass 玻璃, Glow 辉光放电,

H Hard coatings 硬质涂层, HMDSO 六甲基硅氧烷, Hydrogen 氢气, Hydrophilic layers 亲水层, Hydrophilicity 亲水性, Hydrophobic 疏水性, Hydrophobic layers 疏水层,

I IC 集成电路, Induction 电感, Inductive plasma 感应等离子体, Industrial pretreatment 工业预处理, Ion 离子, Ion implantation 离子注入, Ion measuring sensor 离子测量传感器, Ion plating 离子镀, Ionization电离, Isotope　同位素, Isotropic 各向同性,

L Langmuir probe Langmuir 探测仪, Lead frame 引线框架, LIGA process LIGA 制程, Lightning discharge 闪电放电, Lithography 光刻, Low pressure plasma 低压等离子体,

M Magazine 暗盒, Magnetic mirror 磁镜, Magnetron 磁控管, Mask 掩膜, Mean free path length 平均自由程长度, MEMS 微机电系统, Metal 金属, MFC / Mass-Flow-Controller 流量控制器, Microsandblasting 微型喷杀, Microwave technology 微波技术, Modification 该变性能,

N Neon light tube 霓虹灯管, Neutron 中子, Non neutral plasmas 非中性等离子体, Nucleon 核子,

O OAUGDP 大气压均匀辉光放电等离子体, Optical coating 光学镀膜, Overetching 过渡蚀刻, Oxygen 氧气,

P PACVD 等离子体辅助化学气相沉积, Painting 涂装, Painting of plastics 塑料涂装, Parallel plate reactor 平行板反应器, PCB 印刷电路板, PE (Polyethylene) 聚乙烯, Permeation 渗透, Photon 光子, Physical etching 物理蚀刻, Physisorption 物理吸附, Pirani sensor 皮拉尼传感器, Plasma 等离子体, Plasma asher 等离子灰化, Plasma boriding 等离子渗硼, Plasma carbonitriding 等离子碳氮共渗, Plasma carburising 等离子渗碳, Plasma chemistry 等离子体化学, Plasma cleaner 等离子体清洁机, Plasma colour 等离子体颜色, Plasma diffusion 等离子体扩散, Plasma etcher 等离子刻蚀机, Plasma etching 等离子刻蚀, Plasma hardening 等离子淬火, Plasma nitriding 离子渗氮, Plasma nitrocarburising 等离子氮炭共渗, Plasma polymerisation 等离子聚合反应, Plasma spray coating 等离子喷涂, Plasma technology 等离子技术, Plasmaasher 等离子灰化机, Plasmacleaner 等离子清洁机, Plasmaetcher 等离子刻蚀机, Plastic 塑料, Plastic coating 塑料涂装, Polyamide (PA) 聚酰胺, Polybutylene Terephthalat (PBT) 聚对苯二甲酸丁二醇酯, Polycarbonate (PC) 聚碳酸酯, Polyethylene terephthalat (PET) 聚对苯二甲酸乙二醇酯, Polymerization 聚合, Polyolefins 聚烯烃, Polyoxymethylen (POM) 聚甲醛, Polypropylene (PP) 聚丙烯, Polystyrene (PS) 聚苯乙烯, Polytetrafluourethylene (PTFE) 聚四氟乙烯, Positive column 正柱, Preparation before sticking 粘着预处理, Pretreatment 预处理, Principle of plasma process 等离子体工艺原理, Printed circuit board 印刷电路板, Process gas 制程气体, Proton 质子, PVC 聚氯乙烯,

R Reactive ion plating (RIP) 反应离子镀, Recipient 接收器, Release agent residues 残留脱模剂, Release agents 脱模剂, RIE 反应离子刻蚀, Roots pump 罗茨泵, Rotary drum 旋转滚筒, Rotary vane pump 旋片泵,

S SEM 扫描电镜, Sheath 鞘层, Silicon 有机硅, Silicon carbide 碳化硅, Silicon dioxide 二氧化硅, Silicon nitride 氮化硅, Silicone 硅, Silver 银, SIMS 二次离子质谱仪, Small flanges 小法兰, Soldering 焊锡, Sputtering 溅射, Stainless steel 不锈钢, Sticking 粘接, Sticking in automotive engineering 汽车工业中的粘接工艺, Sticking of glass 玻璃粘接, Sticking PE 聚乙烯粘接, Sulfur hexafluoride 六氟化硫, Surface energy 表面能, Surface oxide 表面氧化, Surface radical 表面自由基, Surface technology 表面技术,

T Tesla 特斯拉, Test ink 测试墨水, Tetrafluoromethane 四氟甲烷, Thornton diagram 桑顿图, Titanium carbide 碳化钛, Titanium nitride 氮化钛, TOS-SIMS TOS的二次离子质谱, Trench 沟槽, Turbomolecular pump 涡轮分子泵,

U Ultraviolet 紫外线, UV radiation 紫外线辐射,

V Vapour Deposition 气相沉积,

W Wetting 润湿,

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