STANDARD PLASMA SYSTEMS

• small scale production
• analysis (SEM, TEM)
• electronic technology
• medical technology
• plastics technology
• elastomer technology
• research and development

UHP stands for Ultra High Purity. This designation is used for the glass chambers of our plasma systems, which can be, depending upon customer's request, made from Borosilicate glass or Quartz glass. The option of UHP is available only for the following units:
Femto, Pico und Nano.

Glass chambers are used in microwave systems and/or with applications where ultra pure surfacing is necessary.  Stainless steel or aluminum chambers can sputter in the smallest quantities, like all metals in a plasma system. For most processes this is not of importance and absolutely negligibly. The aluminum construction units from the UHP plant are coated with AL2O3.

The plasma system NANO UHP doesn't have a stainless steel chamber thus it is suitable for applications in which vestiges of chrome, nickel and iron are inconveniant.