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MACHINES FOR RENT - STANDARD PLASMA SYSTEMS
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[ MACHINES FOR RENT: TETRA-30-LF-PC - AVAILABLE AT SHORT NOTICE
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The small scale
system TETRA-30-LF-PC with 30 litres chamber volume
is used for production in the domains: cleaning, etching and activation.
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Brochure
TETRA (PDF 815 KB) |
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Technical Data:
switchgear cabinet:
W 600 mm, H 800 mm, D 650 mm
chamber:
W 305 mm, H 300 mm, L 370 mm
(optional: L 625 mm)
chamber volume:
approx. 34 litres
gas supply:
3 gas channels through MFC
generator:
40kHz/0-1000 W
(optional 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D16B (25 m³/h)
trays:
up to 6 trays
(optional: rotary drum)
control:
PC control (Windows)
options / accessories
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TETRA-30-LF-PC: With PC- control. Build for production,
cleaning, activation, etching. |
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Tetra-30-LF-PC as stand alone machine
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Technical Data:
switchgear cabinet:
W 600 mm, H 2.200 mm, D 850 mm
chamber:
W 305 mm, H 300 mm, D 370 mm
(optional: D 625 mm)
chamber volume:
approx. 34 litres
gas supply:
3 gas channels through MFCs
generator:
40kHz/0-1000 W
(optional: 13.56 MHz or 2.45 GHz)
trays:
up to 6 trays
(optional: rotary drum)
control:
PC control (Windows)
options / accessories
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TETRA-30-LF-PC: With PC control. Build for production,
cleaning, activation, etching. |
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Please contact us if you have
technical questions. |
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