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Technical Data:
switchgear cabinet:
W 550 mm, H 330 mm, D 500 mm
chamber:
Ø 130 mm, L 300 mm
chamber opening Ø: 125 mm
materials: quartz or borosilicate glass
front-and backside of the chamber: aluminium
chamber volume:
approx. 4 litres
gas supply:
two gas channels through needle valve
generator:
40kHz/100 W, infinitely variable
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type Trivac D2.5B (2.5 m³/h)
trays:
1 pc. tray
control:
semi-automatic, process time by timer
options / accessories
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PICO UHP: It is also possible to use this system for
cleaning of optical parts.
Plasma in PICO UHP.
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